| GMT Capital Corp10% owner · 27 transactions | — | 14.05Mas of Aug 2016 | — | 1.48M | 2.12M |
| Dauwalter James EDirector · 435 transactions | — | 3.23M†as of Feb 2008 | 484.6K | — | 1.05M |
| Argov GideonPres & Chief Executive Officer, Director · 34 transactions | — | 922.4Kas of Nov 2012 | 1.32M | 80.0K | 504.5K |
| Villas John DFormer Employee of Entegris · 98 transactions | — | 450.2K†as of Jul 2007 | 305.4K | — | 363.3K |
| Goodman John BFormer Entegris, Inc. Sr. V.P. · 220 transactions | — | 355.2K†as of Dec 2010 | 157.6K | — | 198.5K |
| Carns Michael P CDirector · 16 transactions | — | 305.0Kas of May 2010 | 140.9K | 160.0K | — |
| Loy BertrandExecutive Chair, Director · 330 transactions | — | 271.7K | 3.53M | — | 2.42M |
| Pandraud Jean MarcFormer employee of Issuer · 65 transactions | — | 195.7Kas of Jul 2008 | 96.7K | — | 81.9K |
| Edlund Todd JamesEVP & COO · 140 transactions | — | 175.4Kas of Mar 2022 | 857.8K | — | 568.8K |
| Klingl Gary FFormer Dir. of Entegris, Inc. · 16 transactions | — | 115.7Kas of May 2011 | 135.7K | — | 10.0K |
| Sullivan Brian FDirector · 37 transactions | — | 98.6Kas of Jun 2017 | 214.9K | 50.0K | 164.1K |
| Sullivan Brian F.Director · 23 transactions | — | 97.6Kas of May 2021 | 14.2K | — | 15.4K |
| Reeder DavidPresident & CEO, Director · 6 transactions | — | 97.2K | 100.1K | — | — |
| Burkett Marvin DDirector · 19 transactions | — | 88.4K†as of Feb 2017 | 92.7K | — | — |
| Christman Daniel WDirector · 71 transactions | — | 86.8Kas of May 2017 | 259.7K | — | 159.2K |
| Tison StuartSVP & President, SCEM · 66 transactions | — | 85.4Kas of Feb 2023 | 130.8K | — | 41.2K |
| Walcott Peter WSr. V.P. & General Counsel · 331 transactions | — | 82.7Kas of Feb 2016 | 376.2K | — | 446.9K |
| Rice Susan G.SVP, Global Human Resources · 48 transactions | — | 69.0K | 155.9K | — | 60.7K |
| Kramer ChristianSr. V.P. & CCO · 5 transactions | — | 62.2Kas of Feb 2016 | 66.8K | — | — |
| Haris Clinton M.SVP & President, APS Division · 60 transactions | — | 61.8K | 131.2K | — | 83.0K |
| Blake Lynn LarsonVice President, Finance, CAO · 21 transactions | — | 57.3Kas of Feb 2012 | 99.1K | — | 126.1K |
| Murphy John JFormer SVP, Human Resources · 113 transactions | — | 56.6Kas of Jul 2017 | 395.0K | — | 329.0K |
| McDaniel Roger DDirector · 111 transactions | — | 53.7Kas of Apr 2014 | 256.7K | — | 190.0K |
| Woodland Daniel D.SVP & President, MS Division · 33 transactions | — | 53.6K | 141.2K | — | 69.5K |
| Bradley Michael ADirector · 41 transactions | — | 53.5Kas of Apr 2022 | 243.9K | — | 129.1K |
| Colella JosephSVP and General Counsel · 37 transactions | — | 52.5K | 59.7K | — | 21.8K |
| Burns Robert NicholasDirector · 24 transactions | — | 44.4Kas of Apr 2021 | 93.5K | — | 43.6K |
| Morris Gregory ColburnFormer SVP, CCO · 57 transactions | — | 35.2Kas of Feb 2015 | 298.5K | — | 334.4K |
| Blachier OlivierSVP, Chief Strategy Officer · 32 transactions | — | 34.9K | 47.8K | — | 8.2K |
| LaGorga LindaSVP, Chief Financial Officer · 10 transactions | — | 33.8K | 50.6K | — | 11.4K |
| Lee SueSVP & General Counsel · 6 transactions | — | 29.0Kas of May 2018 | 33.0K | — | — |
| Beckman Bruce W.SVP, Finance · 33 transactions | — | 28.8Kas of Feb 2023 | 46.7K | — | 24.6K |
| Rucci CoreySVP, Business Development · 89 transactions | — | 28.5K†as of Mar 2022 | 185.4K | — | 151.9K |
| Richards NeilSVP, GOSCQ · 15 transactions | — | 27.8Kas of Apr 2025 | 14.6K | — | 330 |
| Saleki-Gerhardt AzitaDirector · 10 transactions | — | 26.4K | 26.4K | — | — |
| Shaner William JamesSVP & President, AMH · 141 transactions | — | 25.7Kas of May 2024 | 617.1K | — | 553.9K |
| Pyle Thomas ODirector · 6 transactions | — | 24.2Kas of May 2007 | 27.5K | — | 7.5K |
| Graves Gregory BEVP & CFO · 296 transactions | — | 20.7Kas of Feb 2023 | 1.44M | 77.0K | 1.41M |
| Gentilcore JamesDirector · 24 transactions | — | 19.9K | 55.9K | — | 35.9K |
| Lederer James PDirector · 19 transactions | — | 18.3K | 46.7K | — | 28.5K |
| Besnard MichaelSVP, Chief Commercial Officer · 19 transactions | — | 17.9Kas of Apr 2025 | 25.7K | — | 12.7K |
| Olson Paul L HDirector · 86 transactions | — | 17.2Kas of Apr 2022 | 243.5K | — | 155.5K |
| O'Neill James AnthonySVP & CTO · 38 transactions | — | 15.7Kas of Apr 2025 | 31.6K | — | 26.7K |
| Kanouff YvetteDirector · 7 transactions | — | 12.5K | 12.5K | — | — |
| Sauer MichaelVP, Controller & CAO · 42 transactions | — | 10.0K | 55.2K | — | 50.6K |
| Marshall Gregory BryanSVP, Qual, EHS & EBS · 26 transactions | — | 10.0Kas of Aug 2019 | 40.1K | — | 37.7K |
| Clark RodneyDirector · 9 transactions | — | 8.9K | 12.5K | — | — |
| Puma Mary GDirector · 3 transactions | — | 5.5K | 5.5K | — | — |
| Anderson James RobertDirector · 3 transactions | — | 4.9Kas of Apr 2024 | 4.9K | — | — |
| Entegris IncDirector · 1 transaction | — | 4.1Kas of Apr 2025 | 2.9K | — | — |
| Nagesh SukhiSVP & Chief Financial Officer · 1 transaction | — | 0 | 8.3K | — | — |