| FP Ultra Clean LLC +1 co-filer10% owner · 1 transaction | — | 4.17Mas of Mar 2006 | — | — | 4.86M |
| Ait Holding Co LLC +1 co-filer10% owner · 45 transactions | — | 2.84Mas of Feb 2014 | — | — | 1.66M |
| Marxe Austin W & Greenhouse David M10% owner · 15 transactions | — | 2.64Mas of Apr 2012 | — | 702.8K | 754.0K |
| Leonid & Inna Mezhvinsky as Trustees of the Revocable Trust Agreement of Leonid Mezhvinsky & Inna Mezhvinsky, Dated April 26, 198810% owner · 1 transaction | — | 1.88Mas of Nov 2006 | — | — | — |
| Joe & Jenny Chen as Trustees of the Joe Chen & Jenny Chen Revocable Trust Dated 200210% owner · 1 transaction | — | 497.8Kas of Nov 2006 | — | — | — |
| Scholhamer James PCEO, Director · 67 transactions | — | 418.5Kas of Jul 2024 | 957.5K | 30.7K | 99.3K |
| Addiego GinettoPresident & COO · 16 transactions | — | 396.8Kas of Mar 2014 | 377.6K | 103.1K | — |
| Eichler Kevin CPresident, CFO · 55 transactions | — | 390.0Kas of Mar 2016 | 564.7K | 34.0K | 92.4K |
| Chinnasami Vijayan S.Chief Operating Officer · 11 transactions | — | 184.3Kas of Apr 2023 | 201.6K | — | 17.3K |
| Brumm SheriCFO, SVP Finance and Secretary · 22 transactions | — | 169.0Kas of Aug 2017 | 216.2K | — | 43.4K |
| Xiao JinsongChief Executive Officer · 2 transactions | — | 149.1K | 149.1K | — | — |
| Mezhvinsky Victor10% owner · 2 transactions | — | 124.5K†as of Nov 2006 | — | — | — |
| Lev LaviPresident, Asia · 47 transactions | — | 121.1Kas of Apr 2018 | 167.1K | — | 63.2K |
| Cook Christopher SPresident, Products Division · 20 transactions | — | 114.7K† | 148.9K | 4.1K | 36.6K |
| Moreman Frank10% owner · 1 transaction | — | 107.9Kas of Nov 2006 | — | — | — |
| Speirs DavidSVP, North America · 25 transactions | — | 106.3K†as of Sep 2018 | 47.6K | 4.2K | 73.4K |
| Granger Clarence LDirector · 280 transactions | — | 85.4K† | 1.33M | 66.0K | 1.35M |
| Savage DavidPresident & COO · 15 transactions | — | 85.0Kas of Jul 2010 | 150.0K | — | 60.0K |
| Bajwa HarjinderChief Operating Officer · 8 transactions | — | 76.7Kas of Jun 2025 | 52.8K | 27.5K | — |
| Bentinck BillPresident, Services Business · 33 transactions | — | 73.9Kas of Apr 2025 | 77.3K | 3.0K | 16.8K |
| Hayward DeborahSVP, Global Acct Mgmt · 54 transactions | — | 73.1Kas of Feb 2015 | 293.8K | — | 201.3K |
| Chenault JohnDirector · 7 transactions | — | 61.0Kas of Jun 2015 | 61.0K | — | — |
| Maddock Ernest EDirector · 11 transactions | — | 58.8K† | 47.8K | 11.0K | — |
| Billat SusanDirector · 12 transactions | — | 56.4Kas of May 2014 | 73.0K | 1.0K | 15.0K |
| Hayward Deborah ESVP, Global Account Mgmt · 39 transactions | — | 55.2Kas of Apr 2018 | 98.8K | — | 97.0K |
| Bingaman MarkPlease see Remarks · 59 transactions | — | 54.5Kas of Oct 2018 | 126.7K | — | 86.6K |
| Scherer Barbara VaughnDirector · 12 transactions | — | 53.5Kas of May 2024 | 62.5K | — | 9.0K |
| D'Ercole RonaldSVP, Global Quality · 22 transactions | — | 52.1Kas of Oct 2018 | 25.0K | — | 37.0K |
| Savage SheriCFO · 146 transactions | — | 51.5K | 316.6K | — | 240.1K |
| Edman Thomas TDirector · 15 transactions | — | 48.6K | 73.3K | — | 24.7K |
| Ibnale David TDirector · 30 transactions | — | 47.8K | 146.3K | 10.0K | 108.5K |
| Victor Mezhvinsky as Trustee of the Joshua Mezhvinsky 2002 Irrevocable Trust Under Agreement Dated June 4, 200410% owner · 1 transaction | — | 42.2Kas of Nov 2006 | — | — | — |
| Mezhvinsky LeonidDirector · 478 transactions | — | 41.4K†as of Nov 2019 | 2.00M | — | 2.03M |
| Sterling JoanSVP, Human Resources · 49 transactions | — | 40.5Kas of Apr 2021 | 88.5K | — | 80.2K |
| Siu ChrisChief Accounting Officer & SVP · 19 transactions | — | 40.1Kas of May 2022 | 67.0K | — | 5.4K |
| Williams William JoePresident, Products Business · 71 transactions | — | 40.0Kas of Apr 2022 | 161.5K | — | 124.6K |
| Liggett Emily MDirector · 21 transactions | — | 38.2K | 73.3K | — | 50.2K |
| Harding Brian EChief Accounting Officer · 43 transactions | — | 37.4K | 87.3K | 4.0K | 32.0K |
| Seto Jacqueline A.Director · 10 transactions | — | 31.5K | 34.7K | — | 3.1K |
| Wier BruceSVP, Engineering · 60 transactions | — | 30.5Kas of Feb 2015 | 246.8K | — | 248.5K |
| Krishnan SowmyaChief Technology Officer · 15 transactions | — | 28.9Kas of Feb 2008 | 20.0K | — | 10.0K |
| Wier Bruce CSVP, Engineering · 14 transactions | — | 28.1Kas of Feb 2016 | 7.2K | — | 381 |
| Palfrey Jamie J.SVP, Global Human Resources · 33 transactions | — | 26.3K | 68.0K | — | 36.2K |
| Chen Minors Irrevocable Trust10% owner · 1 transaction | — | 26.0Kas of Nov 2006 | — | — | — |
| Cho Paul YoonkuGeneral Counsel and Secretary · 48 transactions | — | 22.9K | 85.9K | — | 31.1K |
| Rohrs Thomas MDirector · 17 transactions | — | 21.1Kas of Nov 2007 | 25.0K | — | 70.0K |
| Sexton JackChief Financial Officer · 19 transactions | — | 20.5Kas of Feb 2009 | 73.0K | 16.0K | 50.0K |
| McKibben Jeffrey L.Chief Information Officer · 29 transactions | — | 17.2K | 64.2K | — | 30.3K |
| Johnson Samuel WilliamsSVP, Services Business · 2 transactions | — | 16.4K | 5.6K | — | — |
| Widmann AmirPresident, Fluid Solutions · 1 transaction | — | 14.5Kas of May 2021 | 14.5K | — | — |
| Henderson Michael RoySVP, Engineering · 10 transactions | — | 13.8Kas of Oct 2018 | 71.7K | — | 44.4K |
| Bachman Brian RDirector · 4 transactions | — | 12.5Kas of Jun 2008 | 17.5K | — | 5.0K |
| Solomon JoanneDirector · 3 transactions | — | 12.1K | 12.1K | — | — |
| Wunar Robert AnthonyChief Operating Officer · 1 transaction | — | 10.7K | 10.7K | — | — |
| Andreson JeffDirector · 1 transaction | — | 7.5Kas of May 2017 | 7.5K | — | — |
| Francisco Partners LP10% owner · 4 transactions | — | 0as of Feb 2007 | — | — | 4.17M |